Plasma processing for VLSI

QRコード(所蔵情報)

フォーマット:

図書

責任表示:

edited by Norman G. Einspruch, Dale M. Brown

言語:

英語

出版情報:

New York ; Orlando : Academic Press, 1984

形態:

xiv, 527 p. : ill. ; 24 cm

著者名:

シリーズ名:

書誌ID:

BA00536241

ISBN:

9780122341083 [0122341082] (: alk. paper)

子書誌情報

所蔵情報

タイトル・著者・出版者が同じ資料

詳細

主題:	Integrated circuits--Very large scale integration; Plasma (Ionized gases)--Industrial applications
分類・件名:	LCC : TK7874 DDC : 621.381/73 LCSH : Integrated circuits -- Very large scale integration LCSH : Plasma (Ionized gases) -- Industrial applications
LCCN:	83022351
注記:	Includes bibliographies and index
TTLL:	eng

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1 図書 Materials and process characterization Einspruch, Norman G., Larrabee, Graydon B., 1932- Academic Press	7 図書 VLSI systems design for digital signal processing Bowen, B. A., Brown, W. R. (William Roy) Prentice-Hall
2 図書 VLSI electronics : microstructure science Einspruch, Norman G. Academic Press	8 図書 VLSI design Einspruch, Norman G. Academic Press
3 図書 VLSI in medicine Gold, Robert D., Einspruch, Norman G. Academic Press	9 図書 VLSI technology Sze, S. M., 1936- McGraw-Hill
4 図書 Lithography for VLSI Einspruch, Norman G., Watts, R. K. (Roderick K.), 1939- Academic Press	10 図書 VLSI technology Sze, S. M., 1936- McGraw-Hill
5 図書 Silicon materials Einspruch, Norman G., Huff, Howard Academic Press	11 図書 Silicon processing for the VLSI era Wolf, Stanley, 1943- Lattice Press
6 図書 Advanced MOS device physics Einspruch, Norman G., Gildenblat, Gennady Sh. Academic Press	12 図書 Surface and interface effects in VLSI Einspruch, Norman G., Bauer, Robert S. Academic Press