Glow discharge processes : sputtering and plasma etching

フォーマット:
図書
責任表示:
Brian Chapman
言語:
英語
出版情報:
New York : Wiley, c1980
形態:
xv, 406 p. : ill. ; 24 cm
著者名:
Chapman, Brian N. <DA00387104>  
シリーズ名:
A Wiley-Interscience publication <BA00493885>
書誌ID:
BA00536398
ISBN:
9780471078289 [047107828X]  CiNii Books  Webcat Plus  Google Books
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