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Structural and electrical properties of ultrathin nitrided gate dielectrics by plasma-assisted methods

フォーマット:
図書
責任表示:
Ruofeng Guo[著]
言語:
英語
出版情報:
[金沢] : [Ruofeng Guo], [2006]
形態:
1冊 ; 30cm
著者名:
郭, 若峰 <DA15900606>  
書誌ID:
BA82278068
子書誌情報
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