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| 1.
論文 |
論文
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黒部, 利次 ; 森田, 知之 ; 山中, 喜彦 ; 広崎, 憲一 ; 坂谷, 勝明 ; Kurobe, Toshiji ; Morita, Tomoyuki ; Yamanaka, Yoshihiko ; Hirosaki, Kenichi ; Sakaya, Katsuaki
概要:
金沢大学理工研究域機械工学系<br />平均粒径5nmの超微粒ダイヤモンド砥粒をイオン交換水に懸濁し，そのスラリーを研磨液としてシリコンウエハの研磨を行った．研磨は，シリコンウエハラップ面について行った．実験の結果，3時間の研磨時間でRa2
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nmまで表面粗さは低減した．実験は，超微粒多結晶ダイヤモンド砥粒についても行った．多結晶ダイヤモンドの場合，研磨能は単結晶ダイヤモンドの場合よりも幾分良いという結果が得られた.<br />出版者照会後に全文公開
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| 2.
その他 |
その他
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坂谷, 勝明 ; Sakaya, Katsuaki
概要:
取得学位：博士(工学)，学位授与番号：博甲第186号，学位授与年月日：平成8年3月25日,学位授与年：1996
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学位論文 |
学位
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坂谷, 勝明
概要:
取得学位: 博士(工学), 授与番号: 甲第1378号, 授与年月日: 平成8年3月25日, 授与大学: 金沢大学, 指導教員: 黒部 利次
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論文
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田中, 秀岳 ; 安田, 嘉和 ; 鈴木, 直彦 ; 坂谷, 勝明 ; 安井, 武司 ; 平尾, 政利
概要:
The study deals with a development of an electric power chuck system for CNC lathe. Today, almost power chuck system for CNC lathes are used with hydraulic system included with hydraulic fluid which causes the environment pollution.
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Besides, not only the hydraulic pump always wastes energy, but also its heat transfer causes thermal deformation and deteriorates machining accuracy. In the study, in order to remove the hydraulic pump system from CNC lathe, the electric power chuck system which is able to adopt to the general CNC lathe and to have enough capability as general hydraulic power chuck system are developed. The electric power chuck system adopt to alternate general hydraulic pump system. From the experimental result, the developed electric power chuck system is found to have enough abilities. In addition, the electric power chuck system aims to improve machining accuracy by intercepting heat transfer and environmental pollution as well as removing the hydraulic system from machine tools.
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| 5.
論文 |
論文
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黒部, 利次 ; 今中, 治 ; 坂谷, 勝明
概要:
New finishing method has been developed by using the electrophoresis phenomenon of fine grain suspehded in liquid, which yields the electrical double layer at the surface of the grain. When the electric power is supplied to electrode set
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into the polishing compound, the grain moves and causes the polishing action to the workpiece surface.- The developed polishing equipment consists of a rotary vessel containing the polishing agent. The experiments were conducted on silicon wafer and ferrous metal specimen using the distilled water or ethylalcohol mixed with fine abrasive grain (Al2O3, SiO2) at the 10-2% volume concentration. The experimental results on the silicon wafer which is placed apart from the electrode showed that the stock removal rate increases with increasing the applied potential. Examination of the surface profile of the polished specimen indicated that the surface roughness decreases with increasing the potential. It can be said that the surface finishing characteristics are controllable by varying the current to the electrode.
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| 6.
論文 |
論文
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坂谷, 勝明 ; 黒部, 利次 ; 鈴木, 繁成 ; 廣崎, 憲一
概要:
A new type of field-assisted fine polishing method for brittle materials has been proposed, which is developed for applying to the polishing on NC grinding machine without the vessel for polishing compound. In this method, the
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non-contact type polishing is realized with fluid grinding wheel which is covered with thick magnetic fluid film holding the abrasive grain. In this report, the surface polishing experiments are conducted on silicon wafers and the polishing characteristics are examined. The following results are obtained : (1) When the clearance between the polisher and the work surface exceeds the definite value, the polishing rate decreases extremely. (2) The use of water based magnetic fluid yields lower polishing rate but smoother surface in comparison with kerosene based magnetic fluid. (3) The surface roughness of polished surface basically depends on grain size and the roughness of the order of nanometers is obtained with fine abrasive grain.
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| 7.
論文 |
論文
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坂谷, 勝明 ; 黒部, 利次 ; 戸島, 靖 ; 廣崎, 憲一
概要:
Efficient fine finishing of optical glass has been conducted by using a newly-developed setup which realizes the finishing of the non-contact type polishing with tin wheel floating by the effect of fluid lubrication. The
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polishing is made by using an electrophoresis phenomenon of fine grain in the water. when the electric power of DC voltage is supplied to the tin wheel rotating in the polishing compound, the grain concentrates on the wheel surface and causes the grinding action in a sense to the workpiece surface Experimental results show that the stock removal rate increases after first decreasing with the applied potential. It is found, however, that applied current intensity has little effect on the stock removal. The characteristics of polished surface have been exmined by AFM. The microtopography of the surface polished with fine abrasive grain indicates that the surface roughness of the order of nanometers is obtained even in the case that high voltage is supplied.
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| 8.
論文 |
論文
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黒部, 利次 ; 山下, 勝久 ; 坂谷, 勝明
概要:
Magnetic field-assisted fine polishing method has been proposed, which uses a magnetic slurry mixed non-ferrous abrasives into a magnetic fluid. Polishing machine has newly been developed which is consisted both of copper rotary disc
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set a strong permanent magnet and a rotary shaft set similar one, it is mounted a specimen to be polished. Magnetic field strength controlled by moving their magnets is responsible for yielding superior surface quality. It is found that polishing machine has high performance finishing ability and the usage of a variety of magnetic fluid is proposed versatile polishing characteristics. Experiments show that kerosene based magnetic fluid has very high polishing performance compared with water based one. The usage of coarse grain gives rise to increase the surface roughnes, and larger clearance between specimen and copper rotary disc lowers finishing rate of wafer in kerosene based magnetic fluid especially. Movement of permanent magnet in copper rotary disc is very effective for finishing of wafer.
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| 9.
論文 |
論文
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黒部, 利次 ; 坂谷, 勝明 ; 今中, 治
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