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論文
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黒部, 利次 ; 今中, 治 ; 坂谷, 勝明
概要:
New finishing method has been developed by using the electrophoresis phenomenon of fine grain suspehded in liquid, which yields the electrical double layer at the surface of the grain. When the electric power is supplied to electrode set
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into the polishing compound, the grain moves and causes the polishing action to the workpiece surface.- The developed polishing equipment consists of a rotary vessel containing the polishing agent. The experiments were conducted on silicon wafer and ferrous metal specimen using the distilled water or ethylalcohol mixed with fine abrasive grain (Al2O3, SiO2) at the 10-2% volume concentration. The experimental results on the silicon wafer which is placed apart from the electrode showed that the stock removal rate increases with increasing the applied potential. Examination of the surface profile of the polished specimen indicated that the surface roughness decreases with increasing the potential. It can be said that the surface finishing characteristics are controllable by varying the current to the electrode.
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| 2.
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黒部, 利次 ; 板垣, 卓 ; 森本, 泰夫
概要:
Fine finished steel ball set into a bearing have been needed in precision machinery field. Spin angle controlled ball la
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pping method developed recently, is to have an excellent performance to lap the ball in which V-groove lapping plates are separated into two parts and three plates are able to rotate independently. Present paper focuses on an effect of lapping plate geometry on finishing characteristics of the steel ball. It is found that Rcurved lapping plates constituting of V-groove have yielded greater stock removal than flat ones. Experiments show that the stock removal is dependent upon spin angle θ which is closely related to slipping distance of ball. Measurements of a sphericity of lapped ball indicate that the geometry of lapping plate has small effect with respect to improvement of it, but causes larger stock removal rate and very smooth surface.
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| 3.
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黒部, 利次 ; 森本, 泰夫
概要:
Spin angle controlled ball lapping method developed recently, is to have an excellent performance to lap the ball, in wh
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ich V-groove lapping plate are separated into two parts and three plates are able to rotate independently. However, lapping of ceramic ball such as a silicon nitride(Si3N4) ball is very hard to finish its ball. Present paper focuses on spin angle controlled grinding of the Si3N4 ball using a diamond wheel. It is found that spin controlled grinding is sufficient to finish the Si3N4 ball. Experiments show that larger spin angle θ yields both higher stock removal rate and lower surface roughness of the ball. Measurements indicate that a sphericity of the ball is closely related to spin angle θ of the ball.
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黒部, 利次 ; 高山, 昌也 ; 中田, 邦夫 ; 上田, 修治
概要:
Polishing of silicon nitride has been conducted by using a newly-developed finishing setup which is able to give the polishing pressure to the workpiece. The polishing is made by using an electrophoresis phenomenon of fine grain in
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liquid. When the electric power of DC voltage is supplied to the electrode set into the polishing compound, the grain moves and causes the polishing action to the workpiece surface. The polishing pad is put onto the stainless disc electrode. It is found from the experiments that unwoven polishing pad and reddish ferrite grain are suitable for the finishing of silicon nitride. Experimental results show that the stock removal rate increases with both the applied potential and load. The characteristics of surface polished are examined by X-ray photo spectroscopy. Photo electron spectra observed suggest that the mechanochemical actions arise on the surface of silicon nitride during the polishing process.
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坂谷, 勝明 ; 黒部, 利次 ; 戸島, 靖 ; 廣崎, 憲一
概要:
Efficient fine finishing of optical glass has been conducted by using a newly-developed setup which realizes the finishing of the non-contact type polishing with tin wheel floating by the effect of fluid lubrication. The
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polishing is made by using an electrophoresis phenomenon of fine grain in the water. when the electric power of DC voltage is supplied to the tin wheel rotating in the polishing compound, the grain concentrates on the wheel surface and causes the grinding action in a sense to the workpiece surface Experimental results show that the stock removal rate increases after first decreasing with the applied potential. It is found, however, that applied current intensity has little effect on the stock removal. The characteristics of polished surface have been exmined by AFM. The microtopography of the surface polished with fine abrasive grain indicates that the surface roughness of the order of nanometers is obtained even in the case that high voltage is supplied.
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| 6.
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黒部, 利次 ; 示野, 和弘 ; 今中, 治
概要:
Need for the controllable finishing of materials such as semiconductors and ceramics, has remarkably increased in the fi
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elds of electronics and precision machinary. A new lapping method has been developed by utilizing functional magnetic fluid which has the ability to move in the magnetic field. The magnetic fluid is a suspension of fine magnetite Fe3O4(smaller than 150Å) in liquid. This lapping method is based on the floatation of nonmagnetic grains suspended into the magnetic fluid in the magnetic field. Lapping experiments were conducted on soda lime glass. It was found from the experiments that the new lapping method is able to control the stock removal rate through varying the current to the electromagnet. The present method may be usefully employed in finishing such parts as aspherical lenses.
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