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論文
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黒部, 利次 ; 山田, 良穂 ; 守吉, 信乃 ; 森田, 知之
概要:
High speed flow finishing method has recently developed, which has an excellent performance for polishing an inner wall
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of stainless steel capillary. However, its method seems to be unable to finish the inner wall of stainless steel pipe. Present paper focuses on the finishing of the inner wall of stainless steel curved pipe with high speed flow finishing method. It is found that an elastic string-type mandrel inserted into the hole of curved pipe has great performance on finishing, in which a diameter of mandrel is slightly smaller than hole size of the pipe. Experiments indicate that surface roughness of the inner wall of curved pipe decreases with the number of slurry flow pass. It is found that surface roughness of the inner wall of a 90°curved pipe decreases with the number of slurry flow pass, however, it incresases inversely after 80 passes and peculiar roughness curve is generated. On the other hand, a 180°curved pipe indicates that there is different surface roughness curve compared with 90°curved pipe. SEM micrographs describe that the spacing of grain boundary on the inner wall surface of the pipe extends gradually with the number of slurry flow pass, and it may be related to the variation of surface roughness.
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| 2.
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黒部, 利次 ; 山田, 良穂 ; 森田, 知之 ; 山中, 喜彦
概要:
The pad with self generating porosity has newly been developed, which is made of the petroleum pitch and the salt grains. Polishing of a silicon wafer is conducted using a new pad which is immersed into the slurry of the
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ultra-dispersed super fine diamonds. It is found that the surface roughness of silicon wafer decreases drastically with the polishing time, in which the slurry of polycrystalline diamonds yields a rapid decrease of surface roughness rather than that of singlecrystalline diamonds. Experiments show that the developed pad has an excellent performance for polishing of the silicon wafer rather than the conventional vesicant polyurethane pad.
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黒部, 利次 ; 山田, 良穂 ; 山本, 桂一郎 ; 三浦, 毅彦
概要:
Stainless steel pipe with fine hole and long size has recently been needed for the flow line of pure gas and liquid, which is used in the field of precision machinery. Inner wall polishing of the capillary is very difficult by ordinary
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finishing methods. High speed slurry flow finishing method developed by authors has been proved to have excellent polishing performance, but it has been needed a long time to obtain an acceptable level of surface roughness decrease. In the present study, effect of an annex of the glass beads into the slurry on the efficiency of finishing has been investigated. Experiments show that the medium of the glass beads annexed into the slurry has fine finishing characteristics rather than slurry medium. Surface roughness decreases with slurry flow pass number and its decreasing modes vary due to the property of medium. Optical micrographs of the medium indicate that the glass bead does not crush and not slenderize during finishing processes.
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論文
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山本, 桂一郎 ; 黒部, 利次 ; 山田, 良穂 ; 三浦, 毅彦
概要:
Stainless steel pipe with fine hole and long size has recently been needed for the flow line of pure gas and liquid, whi
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ch is used in the field of precision machinery. Inner wall polishing of the capillary is very difficult by ordinary finishing methods. In the present study, new polishing method has been developed, in which polishing is performed by flowing slurry at high velocity through the capillary. The developed machine has been proved to have excellent polishing performance. Experiments show that the surface roughness of as-received stainless steel capillary is reduced from 0.7 μ mRa to about 0.1 μ mRa within several tens of slurry passes. The roughness of finished surfaces decreases with increase in abrasive grain concentration, and with increase in grain size. Optical and scanning electron micrographs of the polished surface indicate that texture pattern of the inner wall disappears in early stage of low pass number. N2 gas flow pressure measurement can be applicable for an estimation of the finishing level.
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