1.

図書
図書
1. Applications of plasma processes to VLSI technology
edited by Takuo Sugano ; translated by Hyo-gun Kim
出版情報: New York : Wiley, c1985
2.

図書
図書
2. Thin films by chemical vapour deposition
C.E. Moroșanu
出版情報: Amsterdam ; Tokyo : Elsevier , Bucharest, Romania : Editura Tehnică, 1990
シリーズ名: Thin films science and technology ; 7
3.

図書
図書
3. Plasma deposited thin films
editors, J. Mort, F. Jansen
出版情報: Boca Raton, Fla. : CRC Press, c1986