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Lecture notes on principles of plasma processing

フォーマット:
図書
責任表示:
Francis F. Chen and Jane P. Chang
言語:
英語
出版情報:
New York : Kluwer Academic/Plenum Publishers, c2003
形態:
ix, 208 p : ill. ; 28 cm + 1 CD-ROM
著者名:
書誌ID:
BA61392702
ISBN:
9780306474972 [0306474972]  CiNii Books  Webcat Plus  Google Books
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