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| 1.
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黒部, 利次 ; 森田, 知之 ; 土橋, 尚久
概要:
Spin angle controlled ball lapping method developed recently, is to have an excellent performance to finish the ball, in which V-groove lapping plate is separated into two parts and three plates are able to rotate independently.
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However, lapping of ceramic ball such as a silicon nitride one is very hard. Present paper focuses on both of the grinding characteristics and polishing ones of a silicon nitride ball. Grinding is conducted using the diamond wheels with grain size degradation, and then polishing is performed with very fine diamond of average grain size of nano-meter. It is found that the grain size degradation grinding method has very effective performance of finishing of the silicon nitride ball. Polishing of the ceramic ball with slurry mixed super fine diamonds into an ion-exchanged water yields higher decrease of nano-meter level of surface roughness. Spin angle controlled finishing method describes that higher finishing performance rather than conventional one.
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| 2.
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黒部, 利次 ; 山田, 良穂 ; 守吉, 信乃 ; 森田, 知之
概要:
High speed flow finishing method has recently developed, which has an excellent performance for polishing an inner wall
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of stainless steel capillary. However, its method seems to be unable to finish the inner wall of stainless steel pipe. Present paper focuses on the finishing of the inner wall of stainless steel curved pipe with high speed flow finishing method. It is found that an elastic string-type mandrel inserted into the hole of curved pipe has great performance on finishing, in which a diameter of mandrel is slightly smaller than hole size of the pipe. Experiments indicate that surface roughness of the inner wall of curved pipe decreases with the number of slurry flow pass. It is found that surface roughness of the inner wall of a 90°curved pipe decreases with the number of slurry flow pass, however, it incresases inversely after 80 passes and peculiar roughness curve is generated. On the other hand, a 180°curved pipe indicates that there is different surface roughness curve compared with 90°curved pipe. SEM micrographs describe that the spacing of grain boundary on the inner wall surface of the pipe extends gradually with the number of slurry flow pass, and it may be related to the variation of surface roughness.
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| 3.
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黒部, 利次 ; 山田, 良穂 ; 森田, 知之 ; 山中, 喜彦
概要:
The pad with self generating porosity has newly been developed, which is made of the petroleum pitch and the salt grains. Polishing of a silicon wafer is conducted using a new pad which is immersed into the slurry of the
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ultra-dispersed super fine diamonds. It is found that the surface roughness of silicon wafer decreases drastically with the polishing time, in which the slurry of polycrystalline diamonds yields a rapid decrease of surface roughness rather than that of singlecrystalline diamonds. Experiments show that the developed pad has an excellent performance for polishing of the silicon wafer rather than the conventional vesicant polyurethane pad.
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黒部, 利次 ; 角田, 久也 ; 小野田, 誠
概要:
Ceramic balls are expected to become useful for tougher bearings than conventional ones. However, the conventional ball
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lapping method which uses a couple of flat and V-groove lapping plates, needs so long machining time. In present paper, efficient lapping method of silicon nitride balls has been proposed. In this method, it is designed that V-groove lapping plate is separated into two parts and three plates are able to rotate independently. This lapping equipment enables the spin angle θ of ball to control from 0° to 90° It is found from the experiments that the spin angle θ of ball has great influence to lapping of silicon nitride one. Stock removal rate increases gradually with increase of the spin angle θ and surface roughness decreases considerably with increase of it in which lapping mode varies from the satin finished surface to scratched one. Experiments indicate that degree of the reduction of deviated diameter of ball from ideal one is dependent both upon the rotational speed and the spin angle.
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黒部, 利次 ; 今中, 治 ; 坂谷, 勝明
概要:
New finishing method has been developed by using the electrophoresis phenomenon of fine grain suspehded in liquid, which yields the electrical double layer at the surface of the grain. When the electric power is supplied to electrode set
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into the polishing compound, the grain moves and causes the polishing action to the workpiece surface.- The developed polishing equipment consists of a rotary vessel containing the polishing agent. The experiments were conducted on silicon wafer and ferrous metal specimen using the distilled water or ethylalcohol mixed with fine abrasive grain (Al2O3, SiO2) at the 10-2% volume concentration. The experimental results on the silicon wafer which is placed apart from the electrode showed that the stock removal rate increases with increasing the applied potential. Examination of the surface profile of the polished specimen indicated that the surface roughness decreases with increasing the potential. It can be said that the surface finishing characteristics are controllable by varying the current to the electrode.
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| 6.
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山本, 桂一郎 ; 黒部, 利次 ; 中森, 啓介
概要:
Stainless steel orifice plate installed into a gas flow controlled device is necessary to finish an inner wall of it. High speed slurry flow finishing method developed in our laboratory has been applied to polish the inner wall of orifice
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plate. Present paper focuses on the relationship between finishing characteristics and gas flow rate through the finished orifice plate. Experiments are conducted under the conditions of high flow rate of slurry suspending the aluminum oxide grains into city water. It is found that surface roughness of the inner wall of trumped-shape hole has decreased with the flow pass number. SEM micrographs indicate that the stripe-pattern on inner wall surface of as-received orifice plate have disappeared with the slurry flow pass number, but the dimension of hole has increased in size. Measurements of gas flow volume through the polished orifice plate show that finishing charac-teristics influences on gas flow curve.
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| 7.
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坂谷, 勝明 ; 黒部, 利次 ; 鈴木, 繁成 ; 廣崎, 憲一
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A new type of field-assisted fine polishing method for brittle materials has been proposed, which is developed for applying to the polishing on NC grinding machine without the vessel for polishing compound. In this method, the
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non-contact type polishing is realized with fluid grinding wheel which is covered with thick magnetic fluid film holding the abrasive grain. In this report, the surface polishing experiments are conducted on silicon wafers and the polishing characteristics are examined. The following results are obtained : (1) When the clearance between the polisher and the work surface exceeds the definite value, the polishing rate decreases extremely. (2) The use of water based magnetic fluid yields lower polishing rate but smoother surface in comparison with kerosene based magnetic fluid. (3) The surface roughness of polished surface basically depends on grain size and the roughness of the order of nanometers is obtained with fine abrasive grain.
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| 8.
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黒部, 利次 ; 杉山, 夏樹
概要:
Optical connector ferrule capillary made of zirconium oxide ceramic has been manufactured by sintering method in high temperature atmosphere, in which dimension of ferrule is unstable. In order to obtain a precise dimension of it,
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high speed flow finishing method developed in our laboratory has been applied to finish a inner wall of capillary. Experiments are conducted under the conditions of high flow rate of slurry suspending the aluminum oxide grains into ion-exchanged water. It is found that the surface roughness of inner wall has decreased drastically in early stage of flow pass number. SEM micrographs indicate that micosurface irregularity of as-received capillary has disappeared in a few slurry flow passes. Measuring the differential pressure between the pressure of Ar gas flowing through the capillary and the atomospheric pressure is proved to have an ability to estimate the finishing condition of inner wall surface.
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| 9.
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黒部, 利次 ; 山田, 良穂 ; 山本, 桂一郎 ; 三浦, 毅彦
概要:
Stainless steel pipe with fine hole and long size has recently been needed for the flow line of pure gas and liquid, which is used in the field of precision machinery. Inner wall polishing of the capillary is very difficult by ordinary
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finishing methods. High speed slurry flow finishing method developed by authors has been proved to have excellent polishing performance, but it has been needed a long time to obtain an acceptable level of surface roughness decrease. In the present study, effect of an annex of the glass beads into the slurry on the efficiency of finishing has been investigated. Experiments show that the medium of the glass beads annexed into the slurry has fine finishing characteristics rather than slurry medium. Surface roughness decreases with slurry flow pass number and its decreasing modes vary due to the property of medium. Optical micrographs of the medium indicate that the glass bead does not crush and not slenderize during finishing processes.
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| 10.
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山本, 桂一郎 ; 黒部, 利次 ; 山田, 良穂 ; 三浦, 毅彦
概要:
Stainless steel pipe with fine hole and long size has recently been needed for the flow line of pure gas and liquid, whi
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ch is used in the field of precision machinery. Inner wall polishing of the capillary is very difficult by ordinary finishing methods. In the present study, new polishing method has been developed, in which polishing is performed by flowing slurry at high velocity through the capillary. The developed machine has been proved to have excellent polishing performance. Experiments show that the surface roughness of as-received stainless steel capillary is reduced from 0.7 μ mRa to about 0.1 μ mRa within several tens of slurry passes. The roughness of finished surfaces decreases with increase in abrasive grain concentration, and with increase in grain size. Optical and scanning electron micrographs of the polished surface indicate that texture pattern of the inner wall disappears in early stage of low pass number. N2 gas flow pressure measurement can be applicable for an estimation of the finishing level.
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