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安藤, 明珠
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We made a collaboration with Otsuka Ohmi Ceramics Co .. ,LTD and Incorporated Company SA WATETSU for development of exquisite replication of ceramics. Othuka Ohmi was mainly provide base ceramic and reconstruction of color. Sawatetsu
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developed the reconstruction of the surface roughness. We, Research Center of Italian Mural Paintings, Kanazawa University took a part of validation of surface roughness and color. The target of the mural paintings was chosen "St. Nicola" which was drawn in the church ofVesita's house.
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安藤, 明珠 ; 株式会社サワテツ
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Our purpose is to reconstruct the surface roughness with higb accuracy as much as we can. To make 30 machined operation, there were three problems that we had to solve. (1) Data size: too big to create operation program, (2) cutting tools:
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the consideration of the balance benveen durability of the tool, cutting time, reconstruction accuracy, (3) cutting amount. By 3D editing software, the data was modified as optimum data sets. And through a trial and error process, we selected 0.5mm diameter cutting tool for our reconstruction.
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安藤, 明珠
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宮下, 明珠
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田中, 隆太郎 ; 西本, 秀人 ; 田中, 大輔 ; 古本, 達明 ; 細川, 晃 ; 上田, 隆司
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田中, 隆太郎 ; 林, 勇伝 ; 田邉, 一真 ; 上田, 隆司 ; 細川, 晃
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This study deals with the trial for improvement of chip controllability in turning with selective laser heat treatment for workpiece. Selective heat treatment for carbon steel JIS S45C was carried out with Nd:YAG laser which
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could be transmitted through an optical fiber and shows higher absorption rate against carbon steels than CO2 laser. In turning of these selective laser heat threatened carbon steel, the chip form changed regular curl from irregular curl and chip breakability was improved compared with non-laser treated carbon steel. Surface roughness was obviously smaller comparing with non-laser treated carbon steel. Especially in the case that the depth of cut was larger, the surface roughness was smaller. As for cutting force, the principal force was slightly smaller, but the thrust force and feed force were almost the same. The cutting temperature was slightly lower. The tool wear was almost same as that in the case of non-laser treated carbon steel.
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佐藤, 昌彦 ; 上田, 隆司
概要:
In this paper, the activity of effective cutting grains in cutting of work and the activity of effective cutting grains in generation of finished surface are described. The former was investigated by the measurement of wheel surface
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temperature immediately after grinding using infrared radiation pyrometer with an optical fiber and the latter was investigated by the measurement of finished surface roughness using three-dimensional surface roughness tracer respectively. These activity of cutting grains in the whole circumference of wheel surface was clarified. The results obtained are as follows: 1) Cutting grains which have effective concern with cutting of work certainly act in every rotation of wheel. 2) The number of effective cutting grains in cutting of work increases as wheel depth of cut increases. 3) Cross-sectional shape of scratch toward grinding direction on the finished surface accurately correspond in the every period of one circumference of wheel in the order of sub-micrometer. 4) Finished surface is generated by some identical cutting grains even when wheel depth of cut increases.
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細川, 晃 ; 織田, 正人 ; 眞下, 和史 ; 佐久間, 邦郎 ; 山田, 啓司 ; 上田, 隆司
概要:
In this study, a new technique of in-process evaluation of the wheel surface is proposed. Five specified wheel surfaces are prepared as the references via the appropriate dressing procedure, and grinding sounds generated by these wheels
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are discrimi-nated by analyzing the dynamic frequency spectrum with a neural network technique. In the case of conventional vitrified-bonded alumina wheel, grinding sound can be identified under the optimum network configuration in such that learning rate is 0.0029 and number of hidden layer is 420. This system can recognize instantaneously the difference of the wheel surface in a good degree of accuracy insofar as the dressing conditions are relatively widely changed. In addition, the network perceives the wheel wear because the grain tips are flattened as grinding proceeds and the grinding sound resembles to that of the wheel generated with lower dressing feed.
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佐藤, 昌彦 ; 上田, 隆司
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In turning of platinum alloy Pt850, the wear behavior of tools and the cutting characteristics of Pt850 are investigated experimentally. K10 carbide, cermet, ceramics and PCD are used as tool materials. K10 carbide and cermet are not
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suitable for the cutting of this material because severe wear on the tool flank was observed after a few second of cutting, that is, the width of the flank wear land was about 1 mm after 10 seconds cutting. The width of wear land of Al2O3 and Si3N4 ceramic tools was small compared with K10 carbide tool, but the cutting forces increased rapidly as the cutting proceed. PCD tool can be used for cutting of Pt850 because the width of flank wear land is much small compared with other tool materials used in this experiment and the increasing rate of cutting force is not so great. The influence of cutting speed on the flank wear of PCD tool is small. The surface roughness of work material Pt850 becomes lower when the smaller feed rate is chosen as a cutting condition and the cutting tool of larger radius corner is used.
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黒部, 利次 ; 森田, 知之 ; 土橋, 尚久
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Spin angle controlled ball lapping method developed recently, is to have an excellent performance to finish the ball, in which V-groove lapping plate is separated into two parts and three plates are able to rotate independently.
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However, lapping of ceramic ball such as a silicon nitride one is very hard. Present paper focuses on both of the grinding characteristics and polishing ones of a silicon nitride ball. Grinding is conducted using the diamond wheels with grain size degradation, and then polishing is performed with very fine diamond of average grain size of nano-meter. It is found that the grain size degradation grinding method has very effective performance of finishing of the silicon nitride ball. Polishing of the ceramic ball with slurry mixed super fine diamonds into an ion-exchanged water yields higher decrease of nano-meter level of surface roughness. Spin angle controlled finishing method describes that higher finishing performance rather than conventional one.
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黒部, 利次 ; 山田, 良穂 ; 守吉, 信乃 ; 森田, 知之
概要:
High speed flow finishing method has recently developed, which has an excellent performance for polishing an inner wall
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of stainless steel capillary. However, its method seems to be unable to finish the inner wall of stainless steel pipe. Present paper focuses on the finishing of the inner wall of stainless steel curved pipe with high speed flow finishing method. It is found that an elastic string-type mandrel inserted into the hole of curved pipe has great performance on finishing, in which a diameter of mandrel is slightly smaller than hole size of the pipe. Experiments indicate that surface roughness of the inner wall of curved pipe decreases with the number of slurry flow pass. It is found that surface roughness of the inner wall of a 90°curved pipe decreases with the number of slurry flow pass, however, it incresases inversely after 80 passes and peculiar roughness curve is generated. On the other hand, a 180°curved pipe indicates that there is different surface roughness curve compared with 90°curved pipe. SEM micrographs describe that the spacing of grain boundary on the inner wall surface of the pipe extends gradually with the number of slurry flow pass, and it may be related to the variation of surface roughness.
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| 12.
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黒部, 利次 ; 山田, 良穂 ; 森田, 知之 ; 山中, 喜彦
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The pad with self generating porosity has newly been developed, which is made of the petroleum pitch and the salt grains. Polishing of a silicon wafer is conducted using a new pad which is immersed into the slurry of the
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ultra-dispersed super fine diamonds. It is found that the surface roughness of silicon wafer decreases drastically with the polishing time, in which the slurry of polycrystalline diamonds yields a rapid decrease of surface roughness rather than that of singlecrystalline diamonds. Experiments show that the developed pad has an excellent performance for polishing of the silicon wafer rather than the conventional vesicant polyurethane pad.
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黒部, 利次 ; 角田, 久也 ; 小野田, 誠
概要:
Ceramic balls are expected to become useful for tougher bearings than conventional ones. However, the conventional ball
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lapping method which uses a couple of flat and V-groove lapping plates, needs so long machining time. In present paper, efficient lapping method of silicon nitride balls has been proposed. In this method, it is designed that V-groove lapping plate is separated into two parts and three plates are able to rotate independently. This lapping equipment enables the spin angle θ of ball to control from 0° to 90° It is found from the experiments that the spin angle θ of ball has great influence to lapping of silicon nitride one. Stock removal rate increases gradually with increase of the spin angle θ and surface roughness decreases considerably with increase of it in which lapping mode varies from the satin finished surface to scratched one. Experiments indicate that degree of the reduction of deviated diameter of ball from ideal one is dependent both upon the rotational speed and the spin angle.
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黒部, 利次 ; 今中, 治 ; 坂谷, 勝明
概要:
New finishing method has been developed by using the electrophoresis phenomenon of fine grain suspehded in liquid, which yields the electrical double layer at the surface of the grain. When the electric power is supplied to electrode set
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into the polishing compound, the grain moves and causes the polishing action to the workpiece surface.- The developed polishing equipment consists of a rotary vessel containing the polishing agent. The experiments were conducted on silicon wafer and ferrous metal specimen using the distilled water or ethylalcohol mixed with fine abrasive grain (Al2O3, SiO2) at the 10-2% volume concentration. The experimental results on the silicon wafer which is placed apart from the electrode showed that the stock removal rate increases with increasing the applied potential. Examination of the surface profile of the polished specimen indicated that the surface roughness decreases with increasing the potential. It can be said that the surface finishing characteristics are controllable by varying the current to the electrode.
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山本, 桂一郎 ; 黒部, 利次 ; 中森, 啓介
概要:
Stainless steel orifice plate installed into a gas flow controlled device is necessary to finish an inner wall of it. High speed slurry flow finishing method developed in our laboratory has been applied to polish the inner wall of orifice
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plate. Present paper focuses on the relationship between finishing characteristics and gas flow rate through the finished orifice plate. Experiments are conducted under the conditions of high flow rate of slurry suspending the aluminum oxide grains into city water. It is found that surface roughness of the inner wall of trumped-shape hole has decreased with the flow pass number. SEM micrographs indicate that the stripe-pattern on inner wall surface of as-received orifice plate have disappeared with the slurry flow pass number, but the dimension of hole has increased in size. Measurements of gas flow volume through the polished orifice plate show that finishing charac-teristics influences on gas flow curve.
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坂谷, 勝明 ; 黒部, 利次 ; 鈴木, 繁成 ; 廣崎, 憲一
概要:
A new type of field-assisted fine polishing method for brittle materials has been proposed, which is developed for applying to the polishing on NC grinding machine without the vessel for polishing compound. In this method, the
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non-contact type polishing is realized with fluid grinding wheel which is covered with thick magnetic fluid film holding the abrasive grain. In this report, the surface polishing experiments are conducted on silicon wafers and the polishing characteristics are examined. The following results are obtained : (1) When the clearance between the polisher and the work surface exceeds the definite value, the polishing rate decreases extremely. (2) The use of water based magnetic fluid yields lower polishing rate but smoother surface in comparison with kerosene based magnetic fluid. (3) The surface roughness of polished surface basically depends on grain size and the roughness of the order of nanometers is obtained with fine abrasive grain.
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黒部, 利次 ; 杉山, 夏樹
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Optical connector ferrule capillary made of zirconium oxide ceramic has been manufactured by sintering method in high temperature atmosphere, in which dimension of ferrule is unstable. In order to obtain a precise dimension of it,
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high speed flow finishing method developed in our laboratory has been applied to finish a inner wall of capillary. Experiments are conducted under the conditions of high flow rate of slurry suspending the aluminum oxide grains into ion-exchanged water. It is found that the surface roughness of inner wall has decreased drastically in early stage of flow pass number. SEM micrographs indicate that micosurface irregularity of as-received capillary has disappeared in a few slurry flow passes. Measuring the differential pressure between the pressure of Ar gas flowing through the capillary and the atomospheric pressure is proved to have an ability to estimate the finishing condition of inner wall surface.
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黒部, 利次 ; 山田, 良穂 ; 山本, 桂一郎 ; 三浦, 毅彦
概要:
Stainless steel pipe with fine hole and long size has recently been needed for the flow line of pure gas and liquid, which is used in the field of precision machinery. Inner wall polishing of the capillary is very difficult by ordinary
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finishing methods. High speed slurry flow finishing method developed by authors has been proved to have excellent polishing performance, but it has been needed a long time to obtain an acceptable level of surface roughness decrease. In the present study, effect of an annex of the glass beads into the slurry on the efficiency of finishing has been investigated. Experiments show that the medium of the glass beads annexed into the slurry has fine finishing characteristics rather than slurry medium. Surface roughness decreases with slurry flow pass number and its decreasing modes vary due to the property of medium. Optical micrographs of the medium indicate that the glass bead does not crush and not slenderize during finishing processes.
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山本, 桂一郎 ; 黒部, 利次 ; 山田, 良穂 ; 三浦, 毅彦
概要:
Stainless steel pipe with fine hole and long size has recently been needed for the flow line of pure gas and liquid, whi
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ch is used in the field of precision machinery. Inner wall polishing of the capillary is very difficult by ordinary finishing methods. In the present study, new polishing method has been developed, in which polishing is performed by flowing slurry at high velocity through the capillary. The developed machine has been proved to have excellent polishing performance. Experiments show that the surface roughness of as-received stainless steel capillary is reduced from 0.7 μ mRa to about 0.1 μ mRa within several tens of slurry passes. The roughness of finished surfaces decreases with increase in abrasive grain concentration, and with increase in grain size. Optical and scanning electron micrographs of the polished surface indicate that texture pattern of the inner wall disappears in early stage of low pass number. N2 gas flow pressure measurement can be applicable for an estimation of the finishing level.
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黒部, 利次 ; 森本, 泰夫
概要:
Spin angle controlled ball lapping method developed recently, is to have an excellent performance to lap the ball, in wh
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ich V-groove lapping plate are separated into two parts and three plates are able to rotate independently. However, lapping of ceramic ball such as a silicon nitride(Si3N4) ball is very hard to finish its ball. Present paper focuses on spin angle controlled grinding of the Si3N4 ball using a diamond wheel. It is found that spin controlled grinding is sufficient to finish the Si3N4 ball. Experiments show that larger spin angle θ yields both higher stock removal rate and lower surface roughness of the ball. Measurements indicate that a sphericity of the ball is closely related to spin angle θ of the ball.
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黒部, 利次 ; 森田, 知之
概要:
Spin angle controlled ball lapping method developed recently, is to have an excellent performance to lap the ball, in wh
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ich V-groove lapping plates are separated into two parts and three plates are able to rotate independently. Present paper focuses on polishing characteristics of a steel ball using vesicant polyurethane pad. Experiments are conducted using an aluminum oxide grain ranging from 5.5 to 0.3 μ m in size. It is found that the surface roughness of steel ball polished by vesicant polyurethane pad is smaller than that of the cast iron lap. Experiments show that the grain size degradation is very effective for decreasing the surface roughness of ball. It describes that spin angle θ influence on both of the surface roughness and stock removal of the ball.
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黒部, 利次 ; 中森, 啓介 ; 青木, 一浩
概要:
High speed flow finishing method has recently developed, which has an excellent performance for polishing an inner wall of stainless steel capillary D Present paper focuses on the finishing characteristics of the inner wall of stainless
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steel pipe with high speed flow finishing method D It is found that bar-type mandrel inserted into the hole of pipe has great performance in finishing, in which a diameter of mandrel is slightly smaller than inside diameter of the pipe D Experiments indicate that surface roughness of the inner wall of pipe decreases with the number of slurry flow pass D It is shown that both of larger grain size and higher concentration of the abrasive in water solvent, have a greater finishing rate of the pipe D. It is described that larger flow pressure of slurry yields greater surface roughness decrease D
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黒部, 利次 ; 杉山, 夏樹 ; 杉森, 博
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Drawing of metal wire has been conducted using a hole die, in which the integrity of hole is very important to warrant the quality of wire. Lapping of inner wall of the hole has been performed usually with hand-finishing using a
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bar daubed the paste kneaded the diamond powder. Hand working, however, needs long time to finish the hole. High speed flow finishing method developed recently, seems to have an excellent performance of the polishing of the hole die. Setup of the hole die finishing has newly developed. It is found that the surface roughness of inner wall of the hole decreases with the slurry flow passes, but that finishing time is very short. Experiments show that the flow finishing yields the smoothed surface and desirable shape of the hole.
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坂谷, 勝明 ; 黒部, 利次 ; 戸島, 靖 ; 廣崎, 憲一
概要:
Efficient fine finishing of optical glass has been conducted by using a newly-developed setup which realizes the finishing of the non-contact type polishing with tin wheel floating by the effect of fluid lubrication. The
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polishing is made by using an electrophoresis phenomenon of fine grain in the water. when the electric power of DC voltage is supplied to the tin wheel rotating in the polishing compound, the grain concentrates on the wheel surface and causes the grinding action in a sense to the workpiece surface Experimental results show that the stock removal rate increases after first decreasing with the applied potential. It is found, however, that applied current intensity has little effect on the stock removal. The characteristics of polished surface have been exmined by AFM. The microtopography of the surface polished with fine abrasive grain indicates that the surface roughness of the order of nanometers is obtained even in the case that high voltage is supplied.
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黒部, 利次 ; Kurobe, Toshiji
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内径1mm以下の極細ステンレス鋼管の内壁面を精密に研磨するために,スラリー高速流動法による研磨法を創案し,本研磨法について実験,理論の両面から検討を行なった.製作した研磨装置は,長尺の極細管の内壁研磨に対応でき,かつ,管の左右端に対してスラ
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リーを往復動させることが可能な構造となっている.管径の異なるステンレス鋼管細管(内径0.28,0.4,0.6mm)の内壁面の研磨を試み,砥粒濃度,砥粒径,細管内径,スラリー注送圧力の影響などの検討を行い,本研磨法の有効性を明らかした.素管内壁の面粗さは,パス回数(スラリーの管内通過数)の増加とともに次第に低減し,その低減の度合は数パス回数の所で大きく,その後漸減状態となって飽和する.細粒よりも粗粒の方が面粗さの低減に効果がある.粗粒による研磨において粗さが飽和した時点で,スラリーを細粒のものに交換し,継続して研磨を行うこと(二段階研磨)によって,さらに粗さを低減できる.SEM観察の結果,素管内壁面に見られるテクスチャー(微細な凹凸模様)はパス回数とともに次第に消滅していく.研磨メカニズムに関して解析的に検討を行った.スラリーの平均流速を測定してレイノルズ数を求めた結果,管内のスラリーの流れは乱流であると考えられるので,スラリーの流速分布に乱流における1/7乗則を用い,細管内壁面の突起高さを考慮して,粗さの低減過程をシミュレーションできることを示した.研磨後の細管に一定流量の窒素ガスを流した時の差圧(大気圧と管内を流れるガス圧力との差)を測定した.差圧に及ぼす管径の違いの影響を補正することで,壁面の粗さと差圧との間に成立する普遍的な実験式が見いだされ,仕上げの程度を差圧測定によって評価できることが分かった.<br />In the field of precision machinery, stainless steel capillaries having fine hole and lomg size has been needed for the flow line of pure gas and liquid. In order to finish the inner wall of such a capillary, new polishing method, in which polishing is performed by letting the slurry flow through the capillary at high speed, has been developed, and it has proved to exibit excellent polishing performance. The effects of number of slurry pass, grain size, slurry injection pressure and inner diameter of the capillary are examined.With increasing number of slurry pass, the surface roughness of as received capillaries decreases rapidly in the early stage of low number of slurry passes, and tends to saturate toa certain level depending on the abrasive grain size. Successive polishing with using fine grains after polishing with coarse grains is effective in further reduction of surface roughness. The decreasing surface roughness of the inner wall results in the increasing conductance of gas flow through the capillary. Accounting for the effect of the capillary diameter on the diffrential pressure which is measured in nitrogen gas flow through the capillary at a constant flow rate, an empirical equation is found between the diffrential pressure and surface roughness.<br />研究課題/領域番号:10650110, 研究期間(年度):1998-2000<br />出典：「超LSI製造用ガスフローメーターステンレス細管内壁の超精密研磨」研究成果報告書 課題番号10650110(KAKEN：科学研究費助成事業データベース（国立情報学研究所）) 本文データは著者版報告書より作成
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黒部, 利次 ; Kurobe, Toshiji
概要:
情報機器や精密機器に搭載されている硬脆性材料の部品の加工の精度の向上とコストの低減を目指して、磁性流体を利用した研削型超精密研磨法の開発研究を行っている.本研究は,磁性流体に砥粒を懸濁した磁性スラリーを用いることにより,加工液を溜めるための
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研磨槽や加工物の移し替えを必要としない研削加工型の最終仕上げ法の開発を指向している.加工装置は,精密型自動XYステージおよび2軸パルスコントローラを用いて,同時2軸制御型の加工実験装置であり,円盤状ポリシャと加工物ホルダを回転させるための2つの直行した回転軸から構成されている.ポリシャ内部には永久磁石を配置して,磁性スラリーをポリシャ外周表面上に保持できるようになっている.また,加工物側回転軸を固定してあるXYステージを速度制御して精密な送りを行ない得るようになっている.硬脆材料であるガラス,シリコンウエハを加工物とし,本研磨法の基本的特性を調べるために,研磨能率と仕上げ精度について研磨回数,クリアランス,磁場強度と磁場勾配の影響を検討した.また,送り速度を制御して加工物を送りながら研磨することによって面創成研磨の加工性能を検討した.さらに本研磨法による鏡面創成への適用について検討した.その結果,水ベース磁性流体とケロシンベース磁性流体では,加工量の大きさがことなること,研磨能率は加工点付近の磁場強度と磁場勾配を変えることによって制御し得ること,また,表面粗さは,使用する砥粒径に強く依存することも明らかとなった.本研磨法を平面創成に適用した実験的検討の結果,加工物の回転中心からの距離に応じて送り速度を制御して研磨を行うことによって精密な平面創成ができること,さらに,磁性スラリーとして粒径の大きい砥粒による研磨の後,小さい粒径の砥粒によって研磨を繰り返すことによって,粗面を高能率で鏡面に仕上げることができることを示した.<br />A new type of field-assisted fine polishing method for brittle materials has been proposed, which is developed for applying to the polishing on NC grinding machine without the vessel for polishing compound. In this method, the non -contact type polishing is realized with fluid grinding wheel which is covered with thick magnetic fluid film holding the abrasive grain. In this research, the surface polishing experiments are conducted on silicon wafers and polishing characteristics are examined. The following results are obtained : (1) When the clearance between the polisher and the work surface exceeds the definite value, the polishing rate decreases extremely. (2) The use of water based magnetic fluid yields lower polishing rate but smoother surface in comparison with kerosene based magnetic fluid. (3) The surface roughness of polished surface basically depends on grain size and the roughness of the order of nanometers is obtained with fine abrasive grains. (4) The developed polishing method is capable of polishing of plane and curved surfaces. (5) The lapped rough surface can be mirror-finished efficiently by succesive polishing with fine abrasive grains after polishing with coarse grains.<br />研究課題/領域番号:08650130, 研究期間(年度):1996-1997<br />出典：「磁性流体を利用した研削型超精密研磨法の開発研究」研究成果報告書 課題番号08650130(KAKEN：科学研究費助成事業データベース（国立情報学研究所）) 本文データは著者版報告書より作成
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